Murata unveils surface mount MEMS angular acceleration sensor

Murata has successfully developed what is believed to be the world’s first surface mount MEMS angular acceleration sensor.

According to the company there has been a growing demand from customers for angular acceleration sensors with compact dimensions, which also feature high sensitivity, low noise and wide frequency band. In order to address this Murata has combined its technology for designing inertial sensors, such as acceleration and gyro sensors with its MEMS (micro electro-mechanical sensor) process technology to develop a surface-mount-type MEMS angular acceleration sensor.

The unit is also believed to be the world's smallest SMD-type angular acceleration sensor, with dimensions of just 5.2 x 2.5mm typ. x 0.8mm max. It incorporates a detection frequency band of more than 1kHz and an angular acceleration equivalent noise effective value of less than 1rad/s²ms.

Murata's surface mount MEMS angular acceleration sensor can be used for the detection of angular acceleration and the detection of rotational vibration.

The unit has been patent registered in Japan and overseas and has more than than 10 patents pending.