Swiss sensor manufacturer Sensirion has launched a new flow sensor for flow rates below 2cc/s (120 ml/min) with hydrocarbon based liquids such as photoresists and solvents.
Designed for use in high purity fluid handling applications in the semiconductor, PV and flat panel display industries, the new SLQ-QT105 sensor features a short measurement response time of approximately 40ms and high sensitivity for flow rates down to 0.05cc/s (3 ml/min). Detection of air bubbles in the microliter range is also possible. Flow is measured without moving parts and non invasively through the wall of a straight flow path. All wetted materials are made from Teflon or quartz glass. The lightweight device is equipped with fittings for 4 x 3mm PFA tubing. A digital interface and RS485 communication is offered for long distance and bus capability.