Analogue MEMS accelerometer can withstand up to 70,000g

Murata's new SCA720 series of analogue MEMS accelerometers is aimed specifically at electrically controlled suspension and engine anti-vibration applications.

Measuring just 7.0 x 8.6 x 3.3mm and constructed from a single crystal silicon, the new devices can withstand forces up to 70,000g. In addition, their 3d structure employs capacitive sensing techniques which gives them ultra sensitive measurement characteristics and strong offset stability. Internal inert gas damping of the MEMS sensing element provides a mechanical low-pass filter that cuts off above 115Hz and provides a good stable amplitude output and noise filtering. By using an analogue output, the SCA720 can be placed a good distance away from the controlling unit without any interference to the sensors output. The sensor is earth gravity compensated with a +1 g offset where Vout is 2.5VDC. Measurement range is 2.11g in both directions, providing a Vout in the range from 0 to 5VDC.