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Advanced Energy expands plasma power generator family

Advanced Energy has expanded its family of plasma power generators with a 10kW pulsed DC power supply that combines power and control capabilities with embedded process optimisation software.

With patented pulsing technology, the Ascent SMS AP (Advanced Pulsing) power supply brings optimal arc management and precise plasma control to challenging thin film deposition applications ranging from semiconductor to solar PV manufacturing.

The 10 kW Ascent SMS AP has the widest safe operating area (SOA) with peak voltages up to 1200 V and frequencies from 0.5 to 150 kHz. Its four-block progressive arc management system with a full voltage reversal is the industry’s most advanced solution, providing the lowest arc energy with available self-adjusting arc parameters that will dynamically move with the process. The AP waveform delivers boost voltage, reverse voltage control and advanced pulse shaping that enables fine-tuning to tailor film morphology and desired film properties.

The unit is the first AE power supply to embed PowerInsight process characterization and optimisation software, simplifying the collection, analysis and translation of data from critical power delivery systems.

PowerInsight provides actionable intelligence that can be applied to optimise processes for improved throughput and yield, as well as reduce unplanned downtime of process equipment. With PowerInsight, Advanced Energy’s pulsed DC power supplies minimise arcing while enhancing deposition rate, film morphology and film properties.

Neil Tyler

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