Fraunhofer IMS

Finkenstrasse 61
Duisburg
47057
Germany
T: 0049 020 337830
F: 0049 020 33783266
W: www.fhg.de
Where to find us

Latest News

New technology helps sensors endure extreme temperatures

Researchers claim to have developed a new technology that makes pressure sensors more robust, enabling them to continue operating normally at temperatures up to 250°C.

Research project looks to the nanoscale

With miniaturisation of electronic components pushing towards the nanoscale, engineering challenges are growing. In a move to address these challenges, a consortium of leading microelectronics companies and research institutions has announced a European initiative aimed at improving engineering efficiency. The project, called NanoInterface, has won funding under the European Union's Seventh Framework Program.

MEMs processing module unveiled

Point 35 Microstructures and the Fraunhofer Institute have unveiled a module solution for advanced MEMS processing. The module enables an amporphous silicon film to be deposited as a sacrificial etch layer in a modified PECVD reactor. This layer can then be etched using the memsstar SVR system.